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SEMI MF84 — Test Method for Measuring Resistivity of Silicon Slices with a Collinear Four-Probe Array
9-0701 (technical revision)
SEMI PV99-0321
This Specification defines the geometric shape
SEMI MF42 — Test Methods for Conductivity Type of Extrinsic Semiconductor Materials
M03200 - SEMI M32 - Guide to Statistical Specifications StdTier-Tier1 SEMI MF84 — Test MethodThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published September 1998; previously published July 2004. Specifications are based on requirements negotiated between trading partners. This document describes an explicit specification form that defines